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Preparation of Si 3 N 4 by Vapor‐Phase Reaction
Author(s) -
KIJIMA K.,
SETAKA N.,
ISHII M.,
TANAKA H.
Publication year - 1973
Publication title -
journal of the american ceramic society
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 0.9
H-Index - 196
eISSN - 1551-2916
pISSN - 0002-7820
DOI - 10.1111/j.1151-2916.1973.tb12516.x
Subject(s) - silicon nitride , vapor phase , citation , library science , materials science , engineering physics , silicon , nanotechnology , physics , computer science , thermodynamics , metallurgy