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Application of the dual‐beam FIB/SEM to metals research
Author(s) -
SIVEL V. G. M.,
VAN DEN BRAND J.,
WANG W. R.,
MOHDADI H.,
TICHELAAR F. D.,
ALKEMADE P. F. A.,
ZANDBERGEN H. W.
Publication year - 2004
Publication title -
journal of microscopy
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.569
H-Index - 111
eISSN - 1365-2818
pISSN - 0022-2720
DOI - 10.1111/j.0022-2720.2004.01329.x
Subject(s) - focused ion beam , materials science , beam (structure) , electron beam induced deposition , transmission electron microscopy , scanning electron microscope , coating , optics , microscope , substrate (aquarium) , cathode ray , dual (grammatical number) , aluminium , electron microscope , alloy , grain boundary , scanning transmission electron microscopy , metallurgy , nanotechnology , electron , composite material , microstructure , ion , chemistry , physics , geology , oceanography , organic chemistry , quantum mechanics , art , literature
Summary The dual‐beam microscope is a combination of a focused ion beam with an electron beam. The instrument used in this work is also equipped with an energy‐dispersive X‐ray system for local elemental analysis. This powerful tool gives access to specific features inside a material. Two different applications are presented in this paper: (1) cross‐sections and transmission electron microscope specimens cut in order to investigate the interface between an aluminium substrate and its epoxy coating; and (2) a grain boundary in a Cu 3 Au alloy. In both cases, the dual beam succeeded where other methods failed.