Premium
Shape control of near‐field probes using dynamic meniscus etching
Author(s) -
Haber L. H.,
Schaller R. D.,
Johnson J. C.,
Saykally R. J.
Publication year - 2004
Publication title -
journal of microscopy
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.569
H-Index - 111
eISSN - 1365-2818
pISSN - 0022-2720
DOI - 10.1111/j.0022-2720.2004.01308.x
Subject(s) - etching (microfabrication) , meniscus , materials science , optics , distortion (music) , isotropic etching , layer (electronics) , composite material , nanotechnology , optoelectronics , physics , amplifier , incidence (geometry) , cmos
Summary Dynamic etching methods for fabricating fibre optic tips are explored and modelled. By vertically translating the fibre during etching by an HF solution under an organic protective layer, a variety of tip shapes were created. The probe taper lengths, cone angles and geometrical probe shapes were measured in order to evaluate the dynamic meniscus etching process. Fibre motion, etching rate, meniscus distortion and etching time were all found to be important variables that can be used to control the final probe shape.