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Fabrication of an ultra‐thick‐oriented 3C‐SiC coating on the inner surface of a graphite tube by high‐frequency induction‐heated halide chemical vapor deposition
Author(s) -
Tu Rong,
Zhang Xian,
Lai Youfeng,
Han Mingxu,
Zhang Song,
Shi Ji,
Li Haiwen,
Goto Takashi,
Zhang Lianmeng
Publication year - 2019
Publication title -
international journal of applied ceramic technology
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.4
H-Index - 57
eISSN - 1744-7402
pISSN - 1546-542X
DOI - 10.1111/ijac.13194
Subject(s) - materials science , coating , chemical vapor deposition , graphite , crystallinity , microstructure , composite material , tube (container) , deposition (geology) , nanotechnology , paleontology , sediment , biology
Cubic SiC (3C‐SiC) is a promising material for nuclear industry applications due to its excellent properties. In this report, a highly oriented thick 3C‐SiC coating with good crystallinity was prepared on the inner surface of a monolithic graphite tube via high‐frequency induction‐heated halide chemical vapor deposition using SiCl 4 , CH 4 , and H 2 as precursors. The texture coefficient ( T C (hkl) ), microstructure, and deposition rate along the tube axis was studied. 3C‐SiC coating with a high (111) orientation and crystallinity was obtained. Along the tube axis, T C (111) was consistent with the temperature distribution. The surficial morphology of the 3C‐SiC coating changed from pebble‐like to hexangular facet and then to hemispherical. The deposition rate and coating thickness were 300 μm/h and 615 μm, respectively, which is sufficiently rapid and thick enough to obtain free‐standing SiC tubes for nuclear reactors.