Premium
Research on a Micro Piezoelectric Gyroscope with Concentrated Rocking‐Mass
Author(s) -
Cheng Yuxiang,
Zhang Weiping,
Tang Jian,
Liu Wu,
Wang Yinghai,
Chen Wenyuan
Publication year - 2015
Publication title -
international journal of applied ceramic technology
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.4
H-Index - 57
eISSN - 1744-7402
pISSN - 1546-542X
DOI - 10.1111/ijac.12397
Subject(s) - gyroscope , vibrating structure gyroscope , microelectromechanical systems , materials science , piezoelectricity , fabrication , operability , sensitivity (control systems) , acoustics , pmut , optoelectronics , electronic engineering , physics , computer science , aerospace engineering , engineering , composite material , medicine , alternative medicine , software engineering , pathology
This study introduces a Micro Electro Mechanical Systems ( MEMS ) piezoelectric gyroscope with a concentrated rocking‐mass, made from PZT ceramic. The gyroscope operates in the rocking mode with a frequency of 91.3 kHz. This gyroscope follows the study of the MEMS piezoelectric BAW gyroscope with an improvement of fewer boundary constraints, which enhances the device's operability and characteristic. Through the MEMS fabrication process, the device with a side of length 12 mm achieves a rate sensitivity of 30.7 μV/°/s and a bias stability of 8.6°/s. This study describes the design, fabrication, circuit system, and characteristics of this micro piezoelectric gyroscope.