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Combinatorial Composition Films and Dielectric Properties of Ba x Sr 1‐ x TiO 3 Grown on Two‐Inch p ‐Si using PLD Process
Author(s) -
AbdelMotaleb Ibrahim M.,
Navuduri Praveen,
Yoo YoungZo,
Chmaissem Omar,
Song JeongHwan
Publication year - 2013
Publication title -
international journal of applied ceramic technology
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.4
H-Index - 57
eISSN - 1744-7402
pISSN - 1546-542X
DOI - 10.1111/ijac.12096
Subject(s) - materials science , pulsed laser deposition , dielectric , deposition (geology) , wafer , perovskite (structure) , thin film , strontium titanate , analytical chemistry (journal) , optoelectronics , nanotechnology , chemical engineering , sediment , paleontology , chemistry , chromatography , biology , engineering
Combinatorial composition films of Ba x Sr 1‐ x TiO 3 were grown on two‐inch p ‐Si by pulsed laser deposition. Large areas of six different combinatorial composition films were grown on the same wafer using three primary target materials. Consequently, the deposition of Ba 0.5 Sr 0.5 TiO 3 films was obtained from targets BaTiO 3 and SrTiO 3 , the deposition of Ba 0.3 Sr 0.7 TiO 3 films was obtained from targets SrTiO 3 and Ba 0.6 Sr 0.4 TiO 3 , and the Ba 0.8 Sr 0.2 TiO 3 film was obtained from targets Ba 0.6 Sr 0.4 TiO 3 and BaTiO 3 . The results indicate that the deposited materials are perovskite structures with high dielectric constants ranging from 49.4 to 193.2 and leakage current densities as low as 1.25 × 10 −7 A/cm 2 at −2V.