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Texture, Microstructure, and Tribological Behavior in T i A l N / S i N x Multilayers
Author(s) -
Chan YuChen,
Chen HsienWei,
Duh JenqGong,
Lee JyhWei
Publication year - 2013
Publication title -
international journal of applied ceramic technology
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.4
H-Index - 57
eISSN - 1744-7402
pISSN - 1546-542X
DOI - 10.1111/ijac.12060
Subject(s) - materials science , microstructure , tribology , amorphous solid , texture (cosmology) , superlattice , sputtering , sputter deposition , composite material , coating , crystallography , nanotechnology , thin film , optoelectronics , chemistry , artificial intelligence , computer science , image (mathematics)
Ti AlN / S i N x multilayers were fabricated by RF reactive magnetron sputtering. Characterizations by TEM , dark‐field images, and SEM revealed the dependence for the thickness of S i N x ( l SiNx ) on the texture and microstructure evolution in multilayers. Epitaxial stabilization in multilayer ameliorated the hardness and H / E ratio. With increasing the l SiNx , the amorphous S i N x altered the coherent interfaces and the superlattice structure, leading to an appreciable decrease in hardness. Nevertheless, this fine‐grained coating exhibited superior resistance to plastic deformation. In the ball‐on‐disk wear tests, the observation of coefficient of friction, worn surfaces, and cross‐sectional worn scars verified that multilayers showed better tribological resistance than that of T i A l N monolayer. Two antiwear mechanisms on the basis of hardness variation and microstructure evolution were proposed to elucidate the favorable durability of T i A l N / S i N x multilayers with various l SiNx .