Broadband Coaxial S-Parameter Measurements for Cryogenic Quantum Technologies

Development of RF and microwave metrology capabilities at cryogenic temperatures is critical for the development of high-performance microwave devices to facilitate commercialization of cryogenic quantum technologies. This article presents a broadband microwave S-parameter calibration scheme suitable for cryogenic environments operating at temperatures down to tens of milli-kelvin (mK). The technique is based on a weighted multi-line thru-reflect-line (TRL) calibration approach and is demonstrated using coaxial air line calibration standards. One- and two-port microwave devices commonly used in cryogenic quantum computing applications, a cryogenic $50 \Omega $ matched load and a cryogenic 6 dB attenuator, were measured. The measured results at mK temperatures indicate that when combined with calibration standards of appropriate electrical length, the weighted multi-line TRL calibration scheme allows broadband frequency coverage compared to conventional TRL calibration schemes utilizing a single line standard. The mechanical and electrical properties of the line standards at mK temperatures were investigated and discussed. These findings establish the feasibility of utilizing multiple off-the-shelf coaxial air lines to enhance the frequency range of calibrations at mK temperatures.