Open AccessGrowth and Characterization of NbTiN Films Synthesized by Reactive Bias Target Ion Beam Deposition (RBTIBD)
Author(s) -
Michael E. Cyberey,
Tannaz Farrahi,
Michael B. Eller,
Jiwei Lu,
Robert M. Weikle,
Omid Noroozian,
Arthur W. Lichtenberger
Publication year - 2019
Publication title -
ieee transactions on applied superconductivity
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.467
H-Index - 84
eISSN - 1558-2515
pISSN - 1051-8223
DOI - 10.1109/tasc.2019.2908254
Subject(s) - materials science , characterization (materials science) , ion beam assisted deposition , deposition (geology) , ion beam , ion beam deposition , ion , beam (structure) , analytical chemistry (journal) , optoelectronics , optics , nanotechnology , physics , chemistry , environmental chemistry , quantum mechanics , paleontology , sediment , biology