Open AccessToward 3D Integrated Photonics Including Lithium Niobate Thin Films: A Bridge Between Electronics, Radio Frequency, and Optical Technology
Author(s) -
Michael Rüsing,
Peter O. Weigel,
Jianhui Zhao,
Shayan Mookherjea
Publication year - 2019
Publication title -
ieee nanotechnology magazine
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.631
H-Index - 16
eISSN - 1942-7808
pISSN - 1932-4510
DOI - 10.1109/mnano.2019.2916115
Subject(s) - lithium niobate , photonics , materials science , silicon photonics , microelectronics , optoelectronics , silicon , hybrid silicon laser , microsystem , thin film , waveguide , radio frequency , engineering physics , nanotechnology , telecommunications , computer science , engineering