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Publication year - 2009
Publication title -
2009 ieee 22nd international conference on micro electro mechanical systems
Language(s) - English
Resource type - Conference proceedings
pISSN - 1084-6999
ISBN - 978-1-4244-2978-3
DOI - 10.1109/memsys.2009.4805584
Subject(s) - components, circuits, devices and systems , engineered materials, dielectrics and plasmas
Presents an index of the authors whose papers are published in the conference.

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