Open AccessFabrication and Characterization of a SU-8 Epoxy Membrane-Based Thermopile Detector With an Integrated Multilayered Absorber Structure for the Mid-IR Region
Author(s) -
Shakeel Ashraf,
Claes Mattsson,
Göran Thungström
Publication year - 2019
Publication title -
ieee sensors journal
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.681
H-Index - 121
eISSN - 1558-1748
pISSN - 1530-437X
DOI - 10.1109/jsen.2019.2896668
Subject(s) - thermopile , photodetector , detector , optoelectronics , materials science , optics , fabrication , absorption (acoustics) , wavelength , analytical chemistry (journal) , infrared , physics , chemistry , medicine , alternative medicine , pathology , chromatography
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