Open AccessMEMS Tunable Photonic Crystal-Cantilever Cavity
Author(s) -
Qiugu Wang,
Depeng Mao,
Liang Dong
Publication year - 2019
Publication title -
journal of microelectromechanical systems
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 0.596
H-Index - 143
eISSN - 1941-0158
pISSN - 1057-7157
DOI - 10.1109/jmems.2019.2936450
Subject(s) - cantilever , photonic crystal , materials science , optoelectronics , microelectromechanical systems , deflection (physics) , optics , wavelength , q factor , resonator , physics , composite material