Open AccessVery High-Frequency Silicon Carbide Microdisk Resonators With Multimode Responses in Water for Particle Sensing
Author(s) -
Hao Jia,
Philip X.L. Feng
Publication year - 2019
Publication title -
journal of microelectromechanical systems
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.596
H-Index - 143
eISSN - 1941-0158
pISSN - 1057-7157
DOI - 10.1109/jmems.2019.2920329
Subject(s) - multi mode optical fiber , resonator , materials science , silicon carbide , optoelectronics , cantilever , whispering gallery wave , responsivity , optics , optical fiber , composite material , photodetector , physics