Open AccessPWM as a Low Cost Method for the Analog Control of MEMS Devices
Author(s) -
Corey Pollock,
Lawrence Barrett,
Pablo G. del Corro,
Alexander Stange,
Thomas G. Bifano,
David J. Bishop
Publication year - 2019
Publication title -
journal of microelectromechanical systems
Language(s) - English
Resource type - Journals
eISSN - 1941-0158
pISSN - 1057-7157
DOI - 10.1109/jmems.2019.2891205
Subject(s) - pulse width modulation , analogue electronics , electronic engineering , amplifier , microelectromechanical systems , computer science , electronics , analog signal processing , analog signal , modulation (music) , pulse frequency modulation , electronic circuit , signal (programming language) , voltage , pulse (music) , electrical engineering , engineering , pulse amplitude modulation , digital signal processing , physics , cmos , quantum mechanics , acoustics , programming language