Open AccessOptimization and Contact Reliability of TiN-Coated Microswitches in Various Gas Environments
Author(s) -
Changhoon Oh,
Maarten P. de Boer
Publication year - 2019
Publication title -
journal of microelectromechanical systems
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.596
H-Index - 143
eISSN - 1941-0158
pISSN - 1057-7157
DOI - 10.1109/jmems.2018.2879894
Subject(s) - tin , materials science , algorithm , computer science , metallurgy