Open AccessDevelopment of a Built-In Micro-Laser Doppler Velocimeter
Author(s) -
Nobutomo Morita,
Hirofumi Nogami,
Eiji Higurashi,
Takahiro Ito,
Renshi Sawada
Publication year - 2016
Publication title -
journal of microelectromechanical systems
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.596
H-Index - 143
eISSN - 1941-0158
pISSN - 1057-7157
DOI - 10.1109/jmems.2016.2518691
Subject(s) - engineered materials, dielectrics and plasmas , components, circuits, devices and systems
Our research group previously developed an integrated micro-laser Doppler velocimeter only 2.8 × 2.8 mm in area and 1-mm thick by minimizing a number of components with multifunctional parts, such as a glass cover with lenses for hermetic sealing and laser collimation, a silicon base for casing, a mirror mount, a laser diode bench, and others. In this paper, by applying a fast Fourier transform analysis to the sensor output, we successfully measured the velocities of plastic, paper, and aluminum objects over a wide velocity range, from 10 μm/s to 10 mm/s, within a 3.3% measurement error, without attaching any scale to the measurement target. We also verified feasible measurement distances for each object and examined how tilt installation error affected the measurements.