Open AccessThe Film Thickness Effect on Electrical Conduction Mechanisms and Characteristics of the Ni–Cr Thin Film Resistor
Author(s) -
Nai-Chuan Chuang,
Jyi-Tsong Lin,
Ting-Chang Chang,
Tsung-Ming Tsai,
Kuan-Chang Chang,
Chih-Wei Wu
Publication year - 2016
Publication title -
ieee journal of the electron devices society
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.69
H-Index - 31
ISSN - 2168-6734
DOI - 10.1109/jeds.2016.2598189
Subject(s) - components, circuits, devices and systems , engineered materials, dielectrics and plasmas
The electrical conduction mechanisms of Ni-Cr thin film resistor are demonstrated by different film thickness through scattering models fitting. The resistivity and temperature coefficient of the resistance of Ni-Cr thin film are measured to investigate the influence of thickness with different annealing temperature. Finally, an oxidation and atom inter-diffusion model was proposed to explain the effects of film thickness on the electrical properties of Ni-Cr thin film resistor under different annealing temperature.