Open AccessStudy of Relaxation of Strain in Patterned Structures using X-Ray Diffraction Technique
Author(s) -
A.R. Khan,
J. Stangl,
G. Bauer,
D. Buca,
B. Hollander,
H. Trinkaus,
S. Mantl,
Roger Loo,
M. Caymax
Publication year - 2006
Publication title -
international sige technology and device meeting
Language(s) - English
Resource type - Conference proceedings
DOI - 10.1109/istdm.2006.1715986
Subject(s) - orthorhombic crystal system , materials science , diffraction , relaxation (psychology) , strain (injury) , annealing (glass) , high resolution , condensed matter physics , stress relaxation , crystallography , optoelectronics , optics , composite material , chemistry , physics , medicine , psychology , social psychology , creep , remote sensing , geology
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