Flexible Ceramic-Based Integrated Sensor for Temperature and Pressure Detection Under High Temperatures

In this letter, a flexible integrated temperature and pressure dual-parameter sensor is realized by mechanically grinding negative temperature coefficient (NTC) thermal ceramics and high temperature piezoelectric ceramics, respectively. The pressure sensor demonstrates good linear sensitivity of 0.3 mV/kPa over a wide pressure range of 0-750 kPa, and maintains stable and reliable output over the temperature range of 25-140 ∘. The integrated NTC unit provides in-situ temperature monitoring, which enables effective real-time calibration for temperature-induced variations in pressure output. The proposed all-ceramic system offers enhanced mechanical and thermal stability, broader sensing ranges, and improved reliability, ensuring accurate and reliable pressure measurements under changing temperature conditions.