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Multislice imaging of integrated circuits by precession X‐ray ptychography
Author(s) -
Shimomura Kei,
Hirose Makoto,
Takahashi Yukio
Publication year - 2018
Publication title -
acta crystallographica section a
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.742
H-Index - 83
ISSN - 2053-2733
DOI - 10.1107/s205327331701525x
Subject(s) - ptychography , materials science , precession , optics , tilt (camera) , electronic circuit , resolution (logic) , multislice , diffraction , silicon , x ray , optoelectronics , physics , nuclear magnetic resonance , computer science , engineering , mechanical engineering , quantum mechanics , astronomy , artificial intelligence
A method for nondestructively visualizing multisection nanostructures of integrated circuits by X‐ray ptychography with a multislice approach is proposed. In this study, tilt‐series ptychographic diffraction data sets of a two‐layered circuit with a ∼1.4 µm gap at nine incident angles are collected in a wide Q range and then artifact‐reduced phase images of each layer are successfully reconstructed at ∼10 nm resolution. The present method has great potential for the three‐dimensional observation of flat specimens with thickness on the order of 100 µm, such as three‐dimensional stacked integrated circuits based on through‐silicon vias, without laborious sample preparation.