Open AccessLocal atomic structure analysis around Mg atom doped in GaN by X‐ray absorption spectroscopy and spectrum simulations
Author(s) -
Isomura Noritake,
Kimoto Yasuji
Publication year - 2021
Publication title -
journal of synchrotron radiation
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.172
H-Index - 99
ISSN - 1600-5775
DOI - 10.1107/s1600577521004008
Subject(s) - x ray absorption spectroscopy , absorption spectroscopy , gallium , spectroscopy , materials science , doping , spectral line , analytical chemistry (journal) , gallium nitride , x ray spectroscopy , atomic physics , absorption (acoustics) , chemistry , optics , optoelectronics , physics , nanotechnology , chromatography , quantum mechanics , astronomy , layer (electronics) , metallurgy , composite material
The identification of the incorporated site of magnesium (Mg) and hydrogen (H) required for p‐type formation in gallium nitride (GaN) power devices has been demonstrated by X‐ray absorption spectroscopy (XAS). In this study, the fluorescence line of Mg with 3 × 10 19 atoms cm −3 was successfully separated from that of Ga using a superconducting tunnel junction array detector with high sensitivity and high energy resolution, and consequently the Mg K ‐edge XAS spectra of such dilute samples were obtained. The site of Mg atoms incorporated into the GaN lattice was identified as the Ga substitutional site by comparing the experimental XAS spectrum with the simulated spectra calculated by density functional theory. In addition, the presence or absence of H around Mg can be determined through distinctive characteristics expected from the spectrum simulations.