Open AccessHigh‐efficiency ultra‐precision comparator for d ‐spacing mapping measurement of silicon
Author(s) -
Yang Junliang,
Li Tang,
Zhu Ye,
Zhang Xiaowei,
Waseda Atsushi,
Fujimoto Hiroyuki
Publication year - 2020
Publication title -
journal of synchrotron radiation
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.172
H-Index - 99
ISSN - 1600-5775
DOI - 10.1107/s1600577520001496
Subject(s) - comparator , optics , detector , physics , synchrotron radiation , photon , photon counting , beam (structure) , silicon , image resolution , materials science , optoelectronics , voltage , quantum mechanics
This article describes a high‐efficiency experimental configuration for a self‐referenced lattice comparator with a `brush beam' of synchrotron radiation from a bending magnet and two linear position‐sensitive photon‐counting‐type X‐ray detectors. The efficiency is more than ten times greater compared with the `pencil‐beam' configuration and a pair of zero‐dimensional detectors. A solution for correcting the systematic deviation of d ‐spacing measurements caused by the horizontal non‐uniformity of the brush beam is provided. Also, the use of photon‐counting‐type one‐dimensional detectors not only improves the spatial resolution of the measurements remarkably but can also adjust the sample's attitude angles easily.