Open AccessDiamond nanofocusing refractive X‐ray lenses made by planar etching technology
Author(s) -
Lyubomirskiy Mikhail,
Boye Pit,
Feldkamp Jan M.,
Patommel Jens,
Schoeder Sebastian,
Schropp Andreas,
Burghammer Manfred,
Wild Christoph,
Schroer Christian G.
Publication year - 2019
Publication title -
journal of synchrotron radiation
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.172
H-Index - 99
ISSN - 1600-5775
DOI - 10.1107/s1600577519007082
Subject(s) - diamond , materials science , optics , beamline , etching (microfabrication) , fabrication , planar , lens (geology) , electron beam lithography , lithography , reactive ion etching , cathode ray , x ray optics , optoelectronics , beam (structure) , electron , resist , x ray , nanotechnology , metallurgy , physics , medicine , alternative medicine , computer graphics (images) , layer (electronics) , pathology , quantum mechanics , computer science
The manufacturing steps and first tests of a refractive lens made of polycrystalline diamond are described. A fabrication process based on electron‐beam lithography and deep reactive ion etching is introduced. Experimental tests on beamline ID13 at the ESRF have been performed. A spot size of 360 nm (FWHM) at an energy E = 24.3 keV is observed.