Open AccessCalibration of a compact XUV soft X‐ray monochromator with a digital autocollimator in situ
Author(s) -
Yuh Jih-Young,
Lin Shang-Wei,
Huang Liang-Jen,
Lee Long-Life
Publication year - 2016
Publication title -
journal of synchrotron radiation
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.172
H-Index - 99
ISSN - 1600-5775
DOI - 10.1107/s1600577516009565
Subject(s) - monochromator , beamline , physics , optics , extreme ultraviolet , angular resolution (graph drawing) , synchrotron , grating , photon energy , calibration , synchrotron radiation , x ray optics , resolution (logic) , photon , x ray , laser , beam (structure) , wavelength , mathematics , combinatorics , quantum mechanics , artificial intelligence , computer science
A digital autocollimator of resolution 0.1 µrad (0.02 arcsec) serves as a handy correction tool for calibrating the angular uncertainty during angular and lateral movements of gratings inside a monochromator chamber under ultra‐high vacuum. The photon energy dispersed from the extreme ultraviolet (XUV) to the soft X‐ray region of the synchrotron beamline at the Taiwan Light Source was monitored using molecular ionization spectra at high resolution as energy references that correlate with the fine angular steps during grating rotation. The angular resolution of the scanning mechanism was <0.3 µrad, which results in an energy shift of 80 meV at 867 eV. The angular uncertainties caused by the lateral movement during a grating exchange were decreased from 2.2 µrad to 0.1 µrad after correction. The proposed method provides a simple solution for on‐site beamline diagnostics of highly precise multi‐axis optical manipulating instruments at synchrotron facilities and in‐house laboratories.