Open AccessOne‐dimensional ion‐beam figuring for grazing‐incidence reflective optics
Author(s) -
Zhou Lin,
Idir Mourad,
Bouet Nathalie,
Kaznatcheev Konstantine,
Huang Lei,
Vescovi Matthew,
Dai Yifan,
Li Shengyi
Publication year - 2016
Publication title -
journal of synchrotron radiation
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.172
H-Index - 99
ISSN - 1600-5775
DOI - 10.1107/s1600577515021621
Subject(s) - figuring , optics , ion beam , ion , physics , beam (structure) , incidence (geometry) , quantum mechanics
One‐dimensional ion‐beam figuring (1D‐IBF) can improve grazing‐incidence reflective optics, such as Kirkpatrick–Baez mirrors. 1D‐IBF requires only one motion degree of freedom, which reduces equipment complexity, resulting in compact and low‐cost IBF instrumentation. Furthermore, 1D‐IBF is easy to integrate into a single vacuum system with other fabrication processes, such as a thin‐film deposition. The NSLS‐II Optical Metrology and Fabrication Group has recently integrated the 1D‐IBF function into an existing thin‐film deposition system by adding an RF ion source to the system. Using a rectangular grid, a 1D removal function needed to perform 1D‐IBF has been produced. In this paper, demonstration experiments of the 1D‐IBF process are presented on one spherical and two plane samples. The final residual errors on both plane samples are less than 1 nm r.m.s. The surface error on the spherical sample has been successfully reduced by a factor of 12. The results show that the 1D‐IBF method is an effective method to process high‐precision 1D synchrotron optics.