Open AccessCharacterization of a piezo bendable X‐ray mirror
Author(s) -
Vani Maurizio,
Freijo Martín Idoia,
Siewert Frank,
Signorato Riccardo,
Yang Fan,
Sinn Harald
Publication year - 2016
Publication title -
journal of synchrotron radiation
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.172
H-Index - 99
ISSN - 1600-5775
DOI - 10.1107/s1600577515019803
Subject(s) - fizeau interferometer , optics , interferometry , offset (computer science) , nanometre , materials science , plane mirror , ceramic , hysteresis , optoelectronics , physics , astronomical interferometer , computer science , quantum mechanics , composite material , programming language
A full‐scale piezo bendable mirror built as a prototype for an offset mirror at the European XFEL is characterized. The piezo ceramic elements are glued onto the mirror substrate, side‐face on with respect to the reflecting surface. Using a nanometre optical component measuring machine and a large‐aperture Fizeau interferometer, the mirror profile and influence functions were characterized, and further analysis was made to investigate the junction effect, hysteresis, twisting and reproducibility.