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Towards high‐flux X‐ray beam compressing channel‐cut monochromators
Author(s) -
Végsö Karol,
Jergel Matej,
Šiffalovič Peter,
Majková Eva,
Korytár Dušan,
Zápražný Zdenko,
Mikulík Petr,
Vagovič Patrik
Publication year - 2016
Publication title -
journal of applied crystallography
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.429
H-Index - 162
ISSN - 1600-5767
DOI - 10.1107/s1600576716013376
Subject(s) - monochromator , grazing incidence small angle scattering , optics , collimator , diffraction , flux (metallurgy) , materials science , scattering , x ray optics , resolution (logic) , x ray , beam (structure) , gas compressor , physics , small angle neutron scattering , neutron scattering , wavelength , artificial intelligence , computer science , metallurgy , thermodynamics
The issue of a high‐flux X‐ray beam compressing channel‐cut monochromator for applications in X‐ray metrology is addressed. A Ge(111) compressor with compression ratio 20.3 was designed on the principle of a combination of symmetric and highly asymmetric diffractions. A pilot application of the single‐point diamond technology (SPDT) to finish active surfaces of X‐ray optics was tested, providing 50% flux enhancement as compared to a Ge(220) counterpart prepared by traditional surface treatment. This is much more than the theoretical 22% forecast and shows the potential of SPDT for preparation of high‐flux X‐ray compressors with a high compression ratio, where highly asymmetric diffraction with a very low exit angle is inevitable. The implications for efficient collection of X‐rays from microfocus X‐ray sources are discussed. A comparison of Ge compressors with Ge parallel channel‐cut monochromators combined with a 50 µm slit shows the several times higher flux of the former, making them applicable in X‐ray diffraction experiments at medium resolution. Furthermore, the Ge(111) compressor was tested as a collimator in high‐resolution grazing‐incidence small‐angle X‐ray scattering (GISAXS) measurements of surface gratings, providing experimental resolution close to 400 nm. This is ∼100 nm smaller than that achieved with the Ge(220) compressor but still approximately twice that of commercial SAXS/GISAXS laboratory setups.