Microstrain distributions in polycrystalline thin films measured by X‐ray microdiffraction

Microstrain distributions were acquired in functional thin films by high‐resolution X‐ray microdiffraction measurements, using polycrystalline CuInSe 2 thin films as a model system. This technique not only provides spatial resolutions at the submicrometre scale but also allows for analysis of thin films buried within a complete solar‐cell stack. The microstrain values within individual CuInSe 2 grains were determined to be of the order of 10 −4 . These values confirmed corresponding microstrain distribution maps obtained on the same CuInSe 2 layer by electron backscatter diffraction and Raman microspectroscopy.