Open AccessCharacterization of substrates for use in X‐ray multilayer optics
Author(s) -
Lodha G. S.,
Yamashita K.,
Haga K.,
Kunieda H.,
Nakajo N.,
Nakamura N.,
Tamura K.,
Tawara Y.,
Bennett J. M.,
Yu J.,
Namba Y.
Publication year - 1998
Publication title -
journal of synchrotron radiation
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.172
H-Index - 99
ISSN - 1600-5775
DOI - 10.1107/s0909049598000958
Subject(s) - characterization (materials science) , x ray optics , optics , x ray , materials science , physics , nanotechnology
The optical performance of platinum–carbon multilayers deposited onto different substrates has been examined. Specular reflectivity and non‐specular diffuse scattering were measured to study the replication of substrate roughness into the multilayer structure. Surface topography was measured before and after deposition using a scanning probe microscope and a mechanical profiler.