
Fabrication and characterization of multilayer supermirrors for hard X‐ray optics
Author(s) -
Yamashita K.,
Akiyama K.,
Haga K.,
Kunieda H.,
Lodha G. S.,
Nakajo N.,
Nakamura N.,
Okajima T.,
Tamura K.,
Tawara Y.
Publication year - 1998
Publication title -
journal of synchrotron radiation
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.172
H-Index - 99
ISSN - 1600-5775
DOI - 10.1107/s0909049597019419
Subject(s) - optics , fabrication , float glass , conical surface , x ray optics , materials science , characterization (materials science) , reflectivity , geometrical optics , sputter deposition , sputtering , optoelectronics , physics , x ray , thin film , nanotechnology , medicine , alternative medicine , pathology , composite material
Multilayer supermirrors stacked with three sets of Pt/C combinations have been fabricated on a flat float‐glass and conical replica foil mirror using a magnetron DC sputtering system, and applied to X‐ray optical systems in the hard X‐ray region. The design of the supermirror is optimized to obtain the highest integrated reflectivity in the energy band and at the grazing angle concerned. X‐ray reflectivities of 30% in the 25–35 keV band at an incidence angle of 0.3° were obtained.