Open AccessMicro X‐ray diffraction analysis of thin films using grazing‐exit conditions
Author(s) -
Noma Takashi,
Iida Atsuo
Publication year - 1998
Publication title -
journal of synchrotron radiation
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.172
H-Index - 99
ISSN - 1600-5775
DOI - 10.1107/s090904959701755x
Subject(s) - microbeam , optics , diffraction , monochromator , materials science , refraction , x ray crystallography , beam (structure) , image resolution , sensitivity (control systems) , thin film , physics , nanotechnology , wavelength , electronic engineering , engineering
An X‐ray diffraction technique using a hard X‐ray microbeam for thin‐film analysis has been developed. To optimize the spatial resolution and the surface sensitivity, the X‐ray microbeam strikes the sample surface at a large glancing angle while the diffracted X‐ray signal is detected with a small (grazing) exit angle. Kirkpatrick–Baez optics developed at the Photon Factory were used, in combination with a multilayer monochromator, for focusing X‐rays. The focused beam size was about 10 × 10 µm. X‐ray diffraction patterns of Pd, Pt and their layered structure were measured. Using a small exit angle, the signal‐to‐background ratio was improved due to a shallow escape depth. Under the grazing‐exit condition, the refraction effect of diffracted X‐rays was observed, indicating the possibility of surface sensitivity.