
Cryogenic high‐resolution X‐ray spectrometers for SR‐XRF and microanalysis
Author(s) -
Frank M.,
Mears C. A.,
Labov S. E.,
Hiller L. J.,
Le Grand J. B.,
Lindeman M. A.,
Netel H.,
Chow D.,
Barfknecht A. T.
Publication year - 1998
Publication title -
journal of synchrotron radiation
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.172
H-Index - 99
ISSN - 1600-5775
DOI - 10.1107/s0909049597014465
Subject(s) - spectrometer , microanalysis , resolution (logic) , detector , full width at half maximum , semiconductor detector , x ray detector , materials science , range (aeronautics) , optics , analytical chemistry (journal) , physics , chemistry , organic chemistry , chromatography , artificial intelligence , computer science , composite material
Experimental results are presented obtained with a cryogenically cooled high‐resolution X‐ray spectrometer based on a 141 × 141 µm Nb‐Al‐Al 2 O 3 ‐Al‐Nb superconducting tunnel junction (STJ) detector in an SR‐XRF demonstration experiment. STJ detectors can operate at count rates approaching those of semiconductor detectors while still providing a significantly better energy resolution for soft X‐rays. By measuring fluorescence X‐rays from samples containing transition metals and low‐ Z elements, an FWHM energy resolution of 6–15 eV for X‐rays in the energy range 180–1100 eV has been obtained. The results show that, in the near future, STJ detectors may prove very useful in XRF and microanalysis applications.