Open AccessHard X‐ray Microbeam Experiment at the Tristan Main Ring Test Beamline of the KEK
Author(s) -
Suzuki Y.,
Kamijo N.,
Tamura S.,
Handa K.,
Takeuchi A.,
Yamamoto S.,
Sugiyama H.,
Ohsumi K.,
Ando M.
Publication year - 1997
Publication title -
journal of synchrotron radiation
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.172
H-Index - 99
ISSN - 1600-5775
DOI - 10.1107/s0909049596014720
Subject(s) - microbeam , beamline , zone plate , optics , storage ring , materials science , x ray , synchrotron , microscopy , physics , beam (structure) , diffraction
A hard X‐ray microbeam with zone‐plate optics has been tested at the MR‐BW‐TL beamline on the Tristan main ring of the KEK, and preliminary experiments on scanning microscopy have also been performed. A sputtered‐sliced Fresnel zone plate with an Au core and Ag/C multilayer is used as an X‐ray focusing device. The outermost zone width of the zone plate is 0.25 μm. A focused spot size of ~ 0.5 μm has been achieved at an X‐ray energy of 8.54 keV. In a scanning X‐ray microscopy experiment, test patterns with submicrometer fine structure have been clearly resolved.