
Three‐dimensional phase‐contrast X‐ray microtomography with scanning–imaging X‐ray microscope optics
Author(s) -
Takeuchi Akihisa,
Uesugi Kentaro,
Suzuki Yoshio
Publication year - 2013
Publication title -
journal of synchrotron radiation
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.172
H-Index - 99
ISSN - 1600-5775
DOI - 10.1107/s0909049513018876
Subject(s) - optics , microscope , microscopy , optical microscope , phase contrast imaging , materials science , line (geometry) , detector , focus (optics) , physics , phase contrast microscopy , scanning electron microscope , geometry , mathematics
A three‐dimensional (3D) X‐ray tomographic micro‐imaging system has been developed. The optical system is based on a scanning–imaging X‐ray microscope (SIXM) optics, which is a hybrid system consisting of a scanning microscope optics with a one‐dimensional (1D) focusing (line‐focusing) device and an imaging microscope optics with a 1D objective. In the SIXM system, each 1D dataset of a two‐dimensional (2D) image is recorded independently. An object is illuminated with a line‐focused beam. Positional information of the region illuminated by the line‐focused beam is recorded with the 1D imaging microscope optics as line‐profile data. By scanning the object with the line focus, 2D image data are obtained. In the same manner as for a scanning microscope optics with a multi‐pixel detector, imaging modes such as phase contrast and absorption contrast can be arbitrarily configured after the image data acquisition. By combining a tomographic scan method and the SIXM system, quantitative 3D imaging is performed. Results of a feasibility study of the SIXM for 3D imaging are shown.