Open AccessA 30 nm‐resolution hard X‐ray microscope with X‐ray fluorescence mapping capability at BSRF
Author(s) -
Yuan Qingxi,
Zhang Kai,
Hong Youli,
Huang Wanxia,
Gao Kun,
Wang Zhili,
Zhu Peiping,
Gelb Jeff,
Tkachuk Andrei,
Hornberger Benjamin,
Feser Michael,
Yun Wenbing,
Wu Ziyu
Publication year - 2012
Publication title -
journal of synchrotron radiation
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.172
H-Index - 99
ISSN - 1600-5775
DOI - 10.1107/s0909049512032852
Subject(s) - optics , synchrotron radiation , image resolution , microscope , materials science , synchrotron , resolution (logic) , x ray , physics , computer science , artificial intelligence
A full‐field transmission X‐ray microscope (TXM) operating continuously from 5 keV to 12 keV with fluorescence mapping capability has been designed and constructed at the Beijing Synchrotron Radiation Facility, a first‐generation synchrotron radiation facility operating at 2.5 GeV. Spatial resolution better than 30 nm has been demonstrated using a Siemens star pattern in both absorption mode and Zernike phase‐contrast mode. A scanning‐probe mode fluorescence mapping capability integrated with the TXM has been shown to provide 50 p.p.m. sensitivity for trace elements with a spatial resolution (limited by probing beam spot size) of 20 µm. The optics design, testing of spatial resolution and fluorescence sensitivity are presented here, including performance measurement results.