Open AccessDeep UV and vacuum ultraviolet spectrophotometer
Author(s) -
E. Schoeffel
Publication year - 2005
Publication title -
journal of synchrotron radiation
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.172
H-Index - 99
ISSN - 1600-5775
DOI - 10.1107/s0909049505031687
Subject(s) - vacuum ultraviolet , ultraviolet , materials science , optics , optoelectronics , physics
Vacuum ultraviolet spectrophotometer (VUVaS) systems perform dual-beam measurements of absorbance, transmittance and reflectance at variable angles in the deep and vacuum UV range (115–380 nm). The McPherson systems simplify material or coating characterization and quality control, and allow transmission and reflectance to be measured and mapped on samples as large as 350 mm. Smaller sample chambers for smaller samples and non-mapping applications are available. 0.1% precision can be achieved regardless of measurement mode. The McPherson VUVaS is the first vacuumnew commercial products