Image quality improvement in a hard X‐ray projection microscope using total reflection mirror optics | Zendy

Mimura Hidekazu | Zendy; Yamauchi Kazuto | Zendy; Yamamura Kazuya | Zendy; Kubota Akihisa | Zendy; Matsuyama Satoshi | Zendy; Sano Yasuhisa | Zendy; Ueno Kazumasa | Zendy; Endo Katsuyoshi | Zendy; Nishino Yoshinori | Zendy; Tamasaku Kenji | Zendy; Yabashi Makina | Zendy; Ishikawa Tetsuya | Zendy; Mori Yuzo | Zendy

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Image quality improvement in a hard X‐ray projection microscope using total reflection mirror optics

Author(s) -

Mimura Hidekazu,

Yamauchi Kazuto,

Yamamura Kazuya,

Kubota Akihisa,

Matsuyama Satoshi,

Sano Yasuhisa,

Ueno Kazumasa,

Endo Katsuyoshi,

Nishino Yoshinori,

Tamasaku Kenji,

Yabashi Makina,

Ishikawa Tetsuya,

Mori Yuzo

Publication year - 2004

Publication title -

journal of synchrotron radiation

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 1.172

H-Index - 99

ISSN - 1600-5775

DOI - 10.1107/s090904950401283x

Subject(s) - optics , interference (communication) , wavelength , x ray optics , physics , interferometry , projection (relational algebra) , reflection (computer programming) , figuring , quality (philosophy) , curved mirror , intensity (physics) , image quality , materials science , x ray , image (mathematics) , computer science , computer network , channel (broadcasting) , algorithm , quantum mechanics , artificial intelligence , programming language

A new figure correction method has been applied in order to fabricate an elliptical mirror to realize a one‐dimensionally diverging X‐ray beam having high image quality. Mutual relations between figure errors and intensity uniformities of diverging X‐ray beams have also been investigated using a wave‐optical simulator and indicate that figure errors in relatively short spatial wavelength ranges lead to high‐contrast interference fringes. By using a microstitching interferometer and elastic emission machining, figure correction of an elliptical mirror with a lateral resolution close to 0.1 mm was carried out. A one‐dimensional diverging X‐ray obtained using the fabricated mirror was observed at SPring‐8 and evaluated to have a sufficiently flat intensity distribution.

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