Open AccessPlane‐wave X‐ray topography and its application at SPring‐8
Author(s) -
Iida Satoshi,
Chikaura Yoshinori,
Kawado Seiji,
Kimura Shigeru
Publication year - 2002
Publication title -
journal of synchrotron radiation
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.172
H-Index - 99
ISSN - 1600-5775
DOI - 10.1107/s0909049502004302
Subject(s) - spring 8 , collimator , wafer , optics , crystal (programming language) , x ray , beamline , physics , plane (geometry) , materials science , geometry , beam (structure) , optoelectronics , mathematics , computer science , programming language
Plane‐wave X‐ray topography experiments were carried out at a 200 m‐long beamline, BL20B2, at SPring‐8. Relatively high‐energy X‐rays of 30 keV with an angular divergence of about 0.01 arcsec were produced by using only one collimator crystal. FZ‐Si and CZ‐Si wafers were characterized in transmission geometry (Laue case). Clear oscillatory profiles in rocking curves of the FZ‐Si crystal were observed. Plane‐wave topographic images of dislocations, growth striations and grown‐in microdefects in the CZ‐Si crystals were obtained. The dependence of the topographic images of the lattice defects on the sample–photoplate distance was also studied.