X‐ray Reflectometer for the Diagnostics of Thin Films During Growth | Zendy

Niggemeier U. | Zendy; Lischka K. | Zendy; Plotz W. M. | Zendy; Holy V. | Zendy

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X‐ray Reflectometer for the Diagnostics of Thin Films During Growth

Author(s) -

Niggemeier U.,

Lischka K.,

Plotz W. M.,

Holy V.

Publication year - 1997

Publication title -

journal of applied crystallography

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 1.429

H-Index - 162

ISSN - 1600-5767

DOI - 10.1107/s0021889897002483

Subject(s) - diffractometer , optics , materials science , reflectivity , thin film , x ray , angular resolution (graph drawing) , resolution (logic) , x ray reflectivity , physics , nanotechnology , mathematics , scanning electron microscope , combinatorics , artificial intelligence , computer science

A new experimental set‐up is described that allows the measurement of the X‐ray reflectivity of thin layers that are contained in a growth chamber ( in situ ). The X‐ray reflectivity measured with our angular dispersive glancing incidence reflectometer is identical, within experimental error, to that measured with a conventional high‐resolution diffractometer.

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