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Structural Parameters of Multilayers as Deduced from X‐ray Specular Reflectivity: Effect of Statistical Thickness Fluctuations
Author(s) -
Manciu M.,
Kordos P.,
Hartdegen H.,
Mānāilā R.
Publication year - 1996
Publication title -
journal of applied crystallography
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.429
H-Index - 162
ISSN - 1600-5767
DOI - 10.1107/s0021889896006358
Subject(s) - specular reflection , reflectivity , optics , bragg's law , lattice (music) , lattice constant , materials science , ideal (ethics) , physics , condensed matter physics , computational physics , diffraction , philosophy , epistemology , acoustics
An analysis is given of the way in which thickness fluctuations in a multilayer can affect the grazing incidence X‐ray reflectivity pattern. It is shown that peak shifts, broadening and height variations can result. They alter in a predictable way the parameter values derived from a fit with an ideal lattice. A principle for designed Bragg reflectors is also proposed.