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High‐resolution triple‐crystal X‐ray diffraction experiments performed at the Australian National Beamline Facility on a silicon sample with lateral periodic superstructure
Author(s) -
Nikulin A. Yu.,
Stevenson A. W.,
Hashizume H.,
Wilkins S. W.,
Cookson D.,
Foran G.,
Garrett R. F.
Publication year - 1995
Publication title -
journal of applied crystallography
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.429
H-Index - 162
ISSN - 1600-5767
DOI - 10.1107/s0021889894010101
Subject(s) - beamline , superstructure , materials science , diffraction , optics , bragg peak , diffractometer , crystal (programming language) , resolution (logic) , x ray , synchrotron radiation , synchrotron , monochromator , silicon , overlayer , crystallography , physics , chemistry , optoelectronics , scanning electron microscope , condensed matter physics , beam (structure) , artificial intelligence , computer science , thermodynamics , programming language , wavelength
The synchrotron X‐ray results reported here are from the first high‐resolution triple‐crystal diffraction experiments performed at the Australian National Beamline Facility (ANBF). At the centre of the ANBF is a multipurpose high‐resolution two‐axis vacuum X‐ray diffractometer. The Si(111) sample studied has been implanted with B + ions through a one‐dimensional SiO 2 strip pattern with a 5.83 μm period and 4 μm open region, to produce a sample with a periodic superstructure in the lateral direction. The triple‐crystal data were collected in the form of two‐dimensional intensity maps in the vicinity of the 111 Bragg peak. Results collected in both air and vacuum are compared, as are results with and without the oxide layer. The data collected in vacuum indicate that it is possible at the ANBF to measure lattice distortions perpendicular to the sample surface with a 50 Å depth resolution.