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Structural Parameters of Multilayers from X‐ray Reflectivity: an Easy‐to‐Handle Approach
Author(s) -
Manciu M.,
Dudas L.,
Sürgers C.,
Mānāilā R.
Publication year - 1995
Publication title -
journal of applied crystallography
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.429
H-Index - 162
ISSN - 1600-5767
DOI - 10.1107/s0021889894010071
Subject(s) - reflectivity , optics , x ray reflectivity , materials science , surface finish , radiation , computational physics , incidence (geometry) , physics , composite material
An analytical approximation was derived for the calculation of the grazing‐incidence X‐ray reflectivity pattern in a defect‐free multilayer. The approximation is valid in the low‐reflectivity θ ranges. For k = (4 π sin θ )/λ > 0.28 Å −1 ( θ > 2° with Cu Kα radiation), the formula deviates by at most 1% from the rigorous matricial approach in the case of most metallic multilayers. The main advantage of the approximation is that it allows the identification of features in the reflectance pattern, from which desired structural parameters (average layer thicknesses, external and internal roughness) can be estimated easily. This approach yields average structural parameters, best approximating those of a real multilayer but ignoring possible defects.