Premium
New apparatus for grazing X‐ray reflectometry in the angle‐resolved dispersive mode
Author(s) -
Naudon A.,
Chihab J.,
Goudeau P.,
Mimault J.
Publication year - 1989
Publication title -
journal of applied crystallography
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.429
H-Index - 162
ISSN - 1600-5767
DOI - 10.1107/s0021889889005819
Subject(s) - reflectometry , optics , grazing , materials science , mode (computer interface) , x ray , physics , computer science , biology , time domain , computer vision , operating system , ecology
A new apparatus is proposed for grazing X‐ray measurements of thin films on flat substrates. The multiple‐beam interferences of parallel layers and/or the Bragg peaks of multilayers are measured in the angular dispersive mode with a position‐sensitive proportional counter. Measurements of thickness, densities and periodicities are easy to carry out on small sample areas in a much shorter time than with a classical goniometric recording. The principle, the design features and the resolution are described. Different examples showing the performance of the set‐up are given.