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Application of a grazing‐incidence X‐ray diffraction technique to the depth‐resolved analysis of structural transformations due to surface treatments
Author(s) -
Pons F.,
Megtert S.,
Pivin J. C.,
Pequignot M.,
Mairey D.,
RoquesCarmes C.
Publication year - 1988
Publication title -
journal of applied crystallography
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.429
H-Index - 162
ISSN - 1600-5767
DOI - 10.1107/s0021889887012196
Subject(s) - specular reflection , diffraction , optics , materials science , reflection (computer programming) , incidence (geometry) , resolution (logic) , surface (topology) , calibration , total internal reflection , angle of incidence (optics) , x ray crystallography , x ray , surface finish , composite material , physics , mathematics , geometry , computer science , artificial intelligence , programming language , quantum mechanics
An experimental set up for X‐ray diffraction experiments at grazing incidence is described. Adjustment and calibration procedures are defined. It allows identification of phases at increasing depth in thin films, with a resolution of 50 nm, by varying the incidence angle above the critical angle of specular reflection. Some examples are given to illustrate the potential of the technique in studies of the effects of surface treatments on bulk specimens. The examples are implantation films with thicknesses between 50 and 500 nm, and also rough films resulting from friction tests of these implanted surfaces.