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Absolute lattice parameter measurements of epitaxial layers
Author(s) -
Fewster P. F.
Publication year - 1982
Publication title -
journal of applied crystallography
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.429
H-Index - 162
ISSN - 1600-5767
DOI - 10.1107/s0021889882011984
Subject(s) - goniometer , lattice constant , lattice (music) , bragg's law , epitaxy , optics , crystal structure , materials science , crystallography , diffraction , chemistry , physics , nanotechnology , layer (electronics) , acoustics
A method for obtaining the absolute lattice parameters of layered structures to an accuracy of a few units in 10 6 is described. A second motorized axis, for a reference crystal, is mounted onto a commercially available single‐axis goniometer, so that double‐crystal rocking curves can be combined with single‐crystal lattice parameter measurements. The rocking curves and lattice parameter measurements are obtained from the same high‐angle Bragg reflection, which results in this high degree of accuracy.