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Measurement of strain and lattice parameter in epitaxic layers
Author(s) -
Hart M.,
Lloyd K. H.
Publication year - 1975
Publication title -
journal of applied crystallography
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.429
H-Index - 162
ISSN - 1600-5767
DOI - 10.1107/s0021889875009491
Subject(s) - goniometer , diffraction , collimator , lattice constant , optics , lattice (music) , materials science , x ray crystallography , crystallography , physics , chemistry , acoustics
A means of measuring strain and lattice parameter directly in epitaxic layers by `double‐crystal' X‐ray diffraction is presented. The method described has three major advantages; that it is achieved by a simple addition to a commercial goniometer; that the area of sample illuminated is defined solely by the collimator; and that single or double‐crystal diffraction can be selected, simultaneously if needed, on exactly the same specimen area.