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Handbook of electronic materials. Vol. 6. Silicon nitride for microelectronic applications, Part 2 by J. T. Milek
Author(s) -
M. M. Woolfson
Publication year - 1972
Publication title -
journal of applied crystallography
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.429
H-Index - 162
ISSN - 1600-5767
DOI - 10.1107/s0021889872009999
Subject(s) - microelectronics , silicon nitride , engineering physics , materials science , nitride , silicon , electronic materials , nanotechnology , optoelectronics , engineering , layer (electronics)
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