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High‐precision spin coater for a synchrotron radiation in situ GISAXS system: for the investigation of formation mechanisms of self‐assembled structures in polymer thin films
Author(s) -
Ogawa Hiroki,
Miyazaki Tsukasa,
Shimokita Keisuke,
Fujiwara Akihiko,
Takenaka Mikihito,
Yamada Tatsuya,
Sugihara Yasunori,
Takata Masaki
Publication year - 2013
Publication title -
journal of applied crystallography
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.429
H-Index - 162
ISSN - 1600-5767
DOI - 10.1107/s0021889813024151
Subject(s) - grazing incidence small angle scattering , materials science , lamellar structure , synchrotron radiation , thin film , optics , scattering , polymer , synchrotron , copolymer , nanotechnology , composite material , small angle neutron scattering , neutron scattering , physics
A high‐precision spin‐coater system has been developed for the investigation of formation mechanisms of self‐assembled structures in polymer thin films. The spin coater was designed to have small axial deflection (<2.6 µm at the maximum speed of 2000 r min −1 ) during rotation in order to maintain the relative position with respect to the incident X‐ray beam, and to be compact (70 mm) in height to facilitate incorporation into an in situ synchrotron radiation grazing‐incidence small‐angle X‐ray scattering (GISAXS) system. The first results of simultaneous measurements on the morphology and film thickness of a triblock copolymer with time resolution of 64 ms during thin‐film formation at 2000 r min −1 provide indispensable information for understanding the vertically grown lamellar structure on the film surface.