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Modified statistical dynamical diffraction theory: analysis of model SiGe heterostructures
Author(s) -
Shreeman P. K.,
Dunn K. A.,
Novak S. W.,
Matyi R. J.
Publication year - 2013
Publication title -
journal of applied crystallography
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.429
H-Index - 162
ISSN - 1600-5767
DOI - 10.1107/s0021889813011308
Subject(s) - diffraction , limit (mathematics) , kinematics , dynamical systems theory , dynamical theory of diffraction , materials science , statistical physics , scattering , computational physics , optics , physics , mathematics , mathematical analysis , quantum mechanics , acousto optics , diffraction grating
A modified version of the statistical dynamical diffraction theory (mSDDT) permits full‐pattern fitting of high‐resolution X‐ray diffraction scans from thin‐film systems across the entire range from fully dynamic to fully kinematic scattering. The mSDDT analysis has been applied to a set of model SiGe/Si thin‐film samples in order to define the capabilities of this approach. For defect‐free materials that diffract at the dynamic limit, mSDDT analyses return structural information that is consistent with commercial dynamical diffraction simulation software. As defect levels increase and the diffraction characteristics shift towards the kinematic limit, the mSDDT provides new insights into the structural characteristics of these materials.